Modeling artificial scanning electron microscope (SEM) and scanning ionmicroscope images has recently become important. This is because of the need toprovide repeatable images with a priori determined parameters. Modeledartificial images are highly useful in the evaluation of new imaging andmetrological techniques, like image-sharpness calculation, or drift-correctedimage composition (DCIC). Originally, the NIST-developed artificial imagegenerator was designed only to produce the SEM images of gold-on-carbonresolution sample for image-sharpness evaluation. Since then, the new improvedversion of the software was written in C++ programming language and is in thePublic Domain. The current version of the software can generate arbitrarysamples, any drift function, and many other features. This work describesscanning in charged-particle microscopes, which is applied both in theartificial image generator and the DCIC technique. As an example, theperformance of the DCIC technique is demonstrated.
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